Product
Turbo Molecular pump TG-M series(Magnetically Levitated Type)
․Does not use any lubricants. Ideal for applications in fields that demand pure vacuums, such as semiconductors and surface analysis.
․Magnetically suspended bearings are used to prevent bearing wear, and eliminate scheduled maintenance such as oil or grease injection.
․Rotational speed control, correspond with each process.
․You can choose from various special specifications to match your applications.
(By-product resistant, Ultra-low vibration, Ultra-high vacuum, Radiation-hardened)
TG-M Series · Magnetically Levitated Compound Molecular Pumps
TG-M 390M~2400M
Fab-Grade Magnetically Levitated Vacuum Pumps
Engineered with high-end Japanese 5-axis magnetic levitation technology, delivering a 100% oil-free, ultra-clean vacuum environment. Featuring advanced resistance to sudden atmospheric inrushes and digital interlock self-diagnostic protection, this series is the premier choice for semiconductor lithography, dry etching, and thin-film deposition tools.
Performance Overview
TG-M Series Design Modular Advantages
Key Technical Features
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100% Oil-Free, Ultra-Clean Vacuum Environments
The magnetically suspended rotor architecture operates entirely without liquid lubricants. This fully eliminates any risk of hydrocarbon backstreaming into the process chamber, meeting the stringent cleanliness protocols of front-end fab applications.
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Dynamic Real-Time Tuning & Rotational Speed Control
The system interacts directly with the host tool to adjust rotational speeds on demand. Pumping speeds can be optimized dynamically based on chamber evacuation or reactive chemical gas flows, maintaining precise process pressure windows.
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Harsh Environment Customization & Special Executions
Osaka Vacuum provides a variety of special configurations tailored to extreme applications: including by-product resistant heated types for harsh etch, ultra-low vibration models (UFRC), ultra-high vacuum specs (UHV), and radiation-hardened executions for physics research.
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Robust High-Pressure Air Inrush Durability
Equipped with patented, high-rigidity reinforced rotor blade engineering. This ensures excellent mechanical durability against accidental venting or air inrushes, significantly minimizing catastrophic rotor damage and wafer line downtime.
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Active Unbalance Force Rejection Control (UFRC)
Features the proprietary UFRC algorithm that actively senses microscopic balance anomalies in real time. By counteracting dynamic forces via magnetic bearing adjustments, it achieves near-zero vibration running conditions.
Special Process Executions
Predictive Maintenance Warnings (Maintenance Call)
The advanced digital controller incorporates a predictive alert feature. By delivering early notifications well before component wear can lead to tool failure, engineering teams can seamlessly schedule preventive maintenance during planned PM windows.
TG-M Series Compound Molecular Pump Nomenclature
TG [Pumping Speed Rating] M [Inlet Flange Standard] [Special Execution Code]
Review the structured selection index below to identify or custom-configure the ideal high-vacuum components for your system integration:
TG390M: Pumping speed of 340 L/s
TG1100M: Pumping speed of 1100 L/s
TG1300M: Pumping speed of 1300 L/s
TG2400M: High-throughput rating of 2400 L/s
VG / VG-F: Japanese Industrial Standard (JIS) vacuum flange interfaces
ISO / ISO-F: International standard claw-clamp or bolted flange options
CF (ConFlat): Metal-gasket knife-edge flanges designed for ultra-high vacuum (UHV)
B (By-product resistant): Patented structure preventing chemical condensation
V (Ultra-low vibration): Equipped with active UFRC vibration cancelation
R (Radiation-hardened): Designed with radiation-proof electronics for advanced research fields
Technical Specification Matrix
| Magnetically Levitated Pump Parameter | TG390M | TG1100M | TG1300M | TG2400M |
|---|---|---|---|---|
| Pumping Speed - N2 (Volume Flow Rate) | 340 L/s | 1100 L/s | 1300 L/s | 2400 L/s |
| Pumping Speed - H2 (Volume Flow Rate) | 220 L/s | 780 L/s | 860 L/s | 1700 L/s |
| Inlet Flange Standards (Inlet Options) | VG150 / ISO160 / CF203 | VG200 / ISO200 / CF253 | VG250 / ISO250 / CF305 | VG300 / ISO300 |
| Ultimate Base Pressure - Standard Type | < 10⁻⁷ Pa (CF Flange) | < 10⁻⁷ Pa (CF Flange) | < 10⁻⁷ Pa (CF Flange) | < 10⁻⁶ Pa (VG/ISO Flanges) |
| Ultimate Base Pressure - Ultra High Vacuum Type | < 10⁻⁸ Pa (CF Dedicated Only) | < 10⁻⁸ Pa (CF Dedicated Only) | < 10⁻⁸ Pa (CF Dedicated Only) | — |
| Max Tolerable Backing Pressure | 350 Pa | 270 Pa | 220 Pa | 200 Pa |
| Levitation Suspension Technology | 5-axis active digital magnetic bearing control | 5-axis active digital magnetic bearing control | 5-axis active digital magnetic bearing control | 5-axis active digital magnetic bearing control |
| Mounting Orientation Freedom | 360° Omnidirectional Installation | 360° Omnidirectional Installation | 360° Omnidirectional Installation | 360° Omnidirectional Installation |
* Note: Every model in this series features an RS232C serial interface (RS485 optional) and is fully compatible with a common digital controller equipped with sensor auto-calibration technology.
Target High-Purity Ultra-High Vacuum Applications
Technical Support & Localized Overhaul Centers
Since 1998, Cutes Corp has served as the exclusive primary distributor and factory-certified service hub for Osaka Vacuum, LTD. turbo molecular pumps in Taiwan.
By combining Cutes Corp’s more than half-century of bedrock industrial vacuum expertise in Taiwan with Osaka Vacuum’s world-renowned TG-M active magnetic bearing technologies, we offer unparalleled engineering value. From precise high-vacuum circuit design, vibration modeling, and tool matching to our locally hosted, factory-certified repair facility with direct parts access, we guarantee efficient support. Our engineering teams provide high-efficiency localized pump auditing, total system overhauls, custom preventative maintenance (PM), and instant spares deployment, serving as the most trusted local partner for semiconductor fabrication and advanced R&D lines.
Breaks traditional model-locking restrictions. The entire series shares a cross-compatible control unit featuring automated sensor alignment, reducing your spare inventory overhead.
Osaka Vacuum's patented Unbalance Force Rejection Control logic dampens dynamic balancing variances down to microscopic limits, ideal for precise exposure and optical metrology tools.