Product
TGkine series(Magnetically Levitated with Integrated Control Unit Type)
model：TGkine
standard：TGkine1700M ~ TGkine4200M
․Integrated controller and power supply on pump.
․No interconnect cable/cable duct nor rack-mount needed, ease of installation and system cost saving.
․Well balanced performance for a wide range of vacuum processes.
․Can be started simultaneously with backing pump in series from atmosphere, shortened initial pump down time.
․Patented design for Etching process.
․Variable rotational speed control(110 rps - 450 rps) on-the-fly.
․No interconnect cable/cable duct nor rack-mount needed, ease of installation and system cost saving.
․Well balanced performance for a wide range of vacuum processes.
․Can be started simultaneously with backing pump in series from atmosphere, shortened initial pump down time.
․Patented design for Etching process.
․Variable rotational speed control(110 rps - 450 rps) on-the-fly.
