Product
Turbo Molecular pump TGkine series(Magnetically Levitated with Integrated Control Unit Type)
․No interconnect cable/cable duct nor rack-mount needed, ease of installation and system cost saving.
․Well balanced performance for a wide range of vacuum processes.
․Can be started simultaneously with backing pump in series from atmosphere, shortened initial pump down time.
․Patented design for Etching process.
․Variable rotational speed control(110 rps - 450 rps) on-the-fly.
TGkine Series · Magnetically Levitated Turbo Molecular Pump
TGkine 1700M ~ 4200M
Heavy-Duty Compound Molecular Vacuum Pumps
Engineered with next-generation compound turbo molecular pump technology, offering advanced space-saving integration, market-leading gas throughput, and an ultra-stable 5-axis magnetic bearing control system for harsh semiconductor and advanced thin-film processes.
Performance Overview
TGkine System Configurations
Key Technical Features
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Integrated Controller & Power Supply
Features an onboard controller and integrated power supply on the pump. Eliminates interconnecting cable networks, cable ducts, and external rack mounting, significantly streamlining tool layout and saving system integration costs.
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Well-Balanced Processing Performance
Delivers exceptional, reliable stability across a broad range of operating pressures and complex vacuum process windows. Advanced compound rotor design optimizes pumping speed profiles and constant backing pressure handling.
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Simultaneous Fast Atmosphere Startup
Interlocks seamlessly with backing pumps to start simultaneously right from atmosphere pressure. This shortens the initial system pump-down time and maximizes process cycle throughput.
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Patented Anti-Corrosion Design for Etching
Features structural optimizations patented specifically for severe etching processes. Utilizes specialized integrated thermal management (TMS) and nickel/corrosion-resistant coatings to completely eliminate product deposition and condensation risks.
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On-The-Fly Variable Rotational Speed
Supports real-time variable rotational speed control from 110 rps to 450 rps. Process engineers can fine-tune precise chamber pressure settings dynamically to match micro-environment demands.
Vacuum Interface Standards
In-house 5-Axis Magnetic Bearings
Equipped with Osaka Vacuum's proprietary 5-axis active levitation mechanism. Contactless operation ensures zero wear, frictionless rotation, and a 100% hydrocarbon-free ultra-clean vacuum environment required for modern sub-micron fabs.
TGkine Model Identification Code Guide
TGkine [Size Code] M [Outlet] [Inlet Type] [Cooling] [Surface] [Controller Type]
Utilize the selection blocks below to decode or customize your tool specifications to meet precise high-vacuum process integrations:
170: 1650 L/s (Inlet 200A)
220: 2200 L/s (Inlet 250A)
330 / 340: 3300 L/s (300A/350A)
380 / 420: 3600 / 4200 L/s High Flow
Outlet Flange: 4 (KF40) / 5 (KF50)
Inlet Flange Type: B (ISO-B) / V (VG Flange)
Cooling Method: W (Water-cooled) / A (Air-cooled)
Surface Spec: B (Standard) / C (Corrosive Harsh Proof)
Onboard Mount: B (Integrated Controller Pump)
Remote Separate: R (Rackmount Remote Controller)
Technical Specification Matrix
| Pump Parameters & Configurations | TGkine 1700M | TGkine 2200M | TGkine 3300M | TGkine 3400M | TGkine 3800M | TGkine 4200M |
|---|---|---|---|---|---|---|
| Volume Flow Rate - N2 | 1650 L/s | 2200 L/s | 3300 L/s | 3300 L/s | 3600 L/s | 4200 L/s |
| Inlet Flange Standards | ISO-B200 / VG200 | ISO-B250 / VG250 | ISO-B320 / VG300 | VG350 Only | ISO-B320 / VG300 | VG350 Only |
| Outlet Exhaust Flange | KF40 / KF50 | KF40 / KF50 | KF40 / KF50 | KF40 / KF50 | KF40 / KF50 | KF40 / KF50 |
| Compression Ratio (N2) | > 2 × 10⁸ | > 2 × 10⁸ | > 1 × 10⁸ | > 1 × 10⁸ | > 2 × 10⁸ | > 2 × 10⁸ |
| Max Gas Throughput (N2) | 4400 sccm | 4400 / 7000 sccm | 2100 / 2600 sccm | 2100 / 2600 sccm | 2800 sccm | 2800 sccm |
| Startup / Shutdown Time | ≤ 10 min | ≤ 10 min | ≤ 11 / 13 min | ≤ 11 / 13 min | ≤ 12 / 14 min | ≤ 12 / 14 min |
| Input Voltage Parameters | Single Phase AC 200-240V | Single Phase AC 200-240V | Single Phase AC 200-240V | Single Phase AC 200-240V | Single Phase AC 200-240V | Single Phase AC 200-240V |
| Mounting Orientations | Any Orientation | Any Orientation | Any Orientation | Any Orientation | Vertical Only | Vertical Only |
* Note: Maximum throughput limits depend on internal system settings, configuration tuning, and backing auxiliary pump performance (Recommended backing pump speed ≥ 2000 L/min).
Target High-Vacuum Process Applications
Technical Support & Localized Overhaul Services
Since 1998, Cutes Corp has served as the exclusive authorized distributor and factory-certified service center for Osaka Vacuum, LTD. turbo molecular pumps in Taiwan.
Combining Cutes Corp’s more than half-century of foundational expertise in industrial vacuum fields across Taiwan with Osaka Vacuum’s world-renowned precision magnetic levitation technologies, we deliver total turnkey value. Beyond upfront line sizing and vacuum system matching, we host a local factory-certified service center with direct parts inventories. Our technical team handles high-efficiency localized repairs, comprehensive overhauls, preventative maintenance (PM), and fast emergency spares deployment—keeping semiconductor fabrication facilities and advanced thin-film operations securely running without downtime.
Full native support for high-speed industrial fields including EtherCAT for intelligent, centralized tool cluster monitoring.
Patented precision temperature control prevents aggressive process gases from condensating or crystallizing internally.