Product
Turbo Molecular pump TG-M series(Magnetically Levitated Type)
model：TG-M
standard：TG390M ~ TG2400M
․Can be mounted in any 360-degree position for greater flexibility with equipment designs.
․Does not use any lubricants. Ideal for applications in fields that demand pure vacuums, such as semiconductors and surface analysis.
․Magnetically suspended bearings are used to prevent bearing wear, and eliminate scheduled maintenance such as oil or grease injection.
․Rotational speed control, correspond with each process.
․You can choose from various special specifications to match your applications.
(By-product resistant, Ultra-low vibration, Ultra-high vacuum, Radiation-hardened)
․Does not use any lubricants. Ideal for applications in fields that demand pure vacuums, such as semiconductors and surface analysis.
․Magnetically suspended bearings are used to prevent bearing wear, and eliminate scheduled maintenance such as oil or grease injection.
․Rotational speed control, correspond with each process.
․You can choose from various special specifications to match your applications.
(By-product resistant, Ultra-low vibration, Ultra-high vacuum, Radiation-hardened)
