Product
DSP Series Compact Screw Dry Vacuum Pump
DSP Series
Compact Screw
Dry Vacuum Pump
This product features two parallel screw rotors and a gearless design, achieving a completely oil-free and maintenance-free operation. Equipped with a compact booster pump, it delivers an ultimate pressure of 0.5 Pa and is backed by Osaka Vacuum's factory-level maintenance standards to ensure long-term equipment reliability.
Key Features
Osaka Vacuum Factory-Level Maintenance
Beyond superior product performance, we provide top-tier maintenance and technical support meeting Japan's Osaka Vacuum factory standards, ensuring zero downtime risk and extending equipment lifespan.
Portable & Lightweight Design
Compact, lightweight, and easy to handle with strong resistance to external interference. The gearless design significantly reduces overall weight, optimizing space utilization.
Low Noise & Low Vibration
The rotor assembly eliminates timing gears for noiseless exhaust and includes a dedicated acoustic enclosure. The screw rotor design effectively prevents exhaust pulsation and reduces vibration.
100% Oil-Free Clean Exhaust
Through its gearless structure, it operates without any lubricating oil. This completely eliminates oil vapor and particle backflow, ensuring absolute cleanliness for process exhaust.
Air-Cooled & Highly Practical
Features an air-cooled design requiring only electrical power, completely eliminating the need for cooling water. A built-in gas ballast enhances the equipment's environmental adaptability.
High-Speed Pumping Performance
The built-in bypass system enables extremely fast pumping speeds near atmospheric pressure, effectively shortening evacuation time and achieving high energy efficiency.
Specifications & Applications
| Model Type | DSP251 / DSP501 |
|---|---|
| Inlet Flange | DSP251: KF25 / DSP501: KF40 |
| Outlet Flange | KF25 |
| Pumping Speed (w/o Gas Ballast) | DSP251: 230 L/min / DSP501: 500 L/min |
| Ultimate Pressure | 0.5 Pa (w/o Gas Ballast) / 2 Pa (w/ Gas Ballast) |
| Power Supply | Single Phase AC100-230V (±10%) |
| Cooling Method | Air-Cooled (No cooling water required) |
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Semiconductor & Electronic Components Widely used in vacuum exhaust processes for Scanning Electron Microscopes (SEM), lithography, and Electron Beams (EB-Gun).
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Physicochemical & Analytical Instruments Ideal for establishing vacuum environments in high-end scientific research equipment, including precision analytical instruments, accelerators, and ion sources.
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Medical Equipment & Pharmaceutical R&D Meets high cleanliness requirements, suitable for oil-free vacuum needs in medical devices and pharmaceutical research and development.
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General Industry & Automated Transfer Suitable for high-speed pumping in automated load locks and transfer chambers, as well as PVD and a wide range of general industrial applications.
Engineering Solutions
Factory-Level Maintenance & Low Operating Costs
Traditional vacuum pumps require regular oil changes. The DSP series eliminates timing gears to achieve a 100% oil-free and maintenance-free design (no shaft seal changes). Furthermore, we possess Osaka Vacuum factory-level maintenance capabilities, providing worry-free equipment protection, dramatically reducing long-term maintenance costs and downtime.
High-Efficiency Operation Without Cooling Water
Addressing the lack of cooling water infrastructure in many facilities, this air-cooled equipment requires only electrical power for stable operation. Combined with its built-in bypass system, it maintains extremely fast pumping speeds near atmospheric pressure, offering dual advantages of deployment flexibility and energy efficiency.
Standard & Optional Accessories
Standard Accessories
- AC100V Power Cable (with grounding plug, 3m)
- Control Signal Connector (D-sub 15-pin female)
- Gas Ballast (prevents water vapor condensation)
- User Manual
To prevent water vapor condensation after use, it is recommended to utilize the gas ballast to introduce dry air or nitrogen.
Optional Accessories
- Suction Filter (KF25 or KF40)
- AC200V Power Cable
- Exhaust Silencer
- Dedicated Pump Fixing Tools
Quality & Certifications
Frequently Asked Questions (FAQ)
When equipment malfunctions, does it need to be returned to the manufacturer in Japan for repair?
No. We possess "Osaka Vacuum factory-level maintenance" technologies and facilities, enabling us to provide local testing, repair, and maintenance services that meet the manufacturer's highest standards, significantly saving cross-border shipping time and costs.
Does this equipment require regular lubricating oil changes?
No. By omitting the timing gears from the rotor assembly, the DSP series features a gearless structure that achieves a 100% oil-free design. This means the equipment itself has extremely low maintenance requirements.
Ready to Upgrade Your Vacuum Exhaust System?
Contact us today. We will provide a tailored DSP Series compact screw dry vacuum pump solution, backed by factory-level maintenance, for your semiconductor, medical, or R&D equipment needs.